SAM® 1480/2480 G4 SERIES
Group Number: 4960G4 models is the most advanced MFC meeting or exceeding the demand of the actual and also the next generation of semiconductor production.
FEATURES
- Multi-gas, multi-range selection
- Pressure-insensitive operation
- Valve shut-off function
- In-line integrated flow verification system
- Self celibration function
- LCD display (temp, pressure, set, output) easifies control routines
BENEFITS
- Great inlet pressure change insensitivity
- Allows one mass flow controller to handle two or more gas types and ranges
- The need for dedicated devices is reduced to only a few models
- Reduces the capital investment and inventory liability
- Performance maintained after gas change
- Shortening gas purge time needed
- Complete gas shut-off
- Gas leaking volume 1/10 related to that with a standard combination (MFC and pneumatic valve)
- Reduction of ga surge
- Allows one mass flow controller to handle two or more gas types and ranges
- The need for dedicated devices is reduced to only a few models
- Reduces the capital investmen and inventory liability
- Performace mainted after gas change