SAM® 1480/2480 G2 SERIES
Group Number: 4960G2 models satisfy the demand for the next generation of semiconductor production.
FEATURES
- Multi-gas, multi-range selection
- Valve shut-off function
- Self calibration function
BENEFITS
- Shortening gas purge time needed
- Complete gas shut-off
- Gas leaking volume 1/10 related to that with a standard combination (MFC and pneumatic valve)
- Reduction of gas surge
- Allows one mass flow controller to handle two or more gas types and ranges
- The need for dedicated devices is reduced to only a few models
- Reduces the capital investment and inventory liability
- Performance maintained after gas change