SAM® 1480/2480 G1 SERIES
Group Number: 4960G1 models satisfy the demand for the next generation of semiconductor production.
FEATURES
- Multi-gas, multi-range selection
- Pressure-insensitive operation
Valve shut-off function - LCD display (temp, pressure, set, output) easifies control routines
BENEFITS
- Great inlet pressure change insensitivity
- Allows one mass flow controller to handle two or more gas types and ranges
- The need for dedicated devices is reduced to only a few models
- Reduces the capital investment and inventory liability
- Performance maintained after gas change