SAM® 1480/2480 G3 SERIES
Group Number: 4960G3 models satisty the demand for the next generation of samiconductor production.
FEATURES
- Multi-gas,multi-range selection
- Pressure-insensitive operation Pl
- LCD display (temp, pressure, set output) easifies control routines
- Self celibration function
BENEFITS
- Great inlet pressure change insensitivity
- Allows one mass flow controller to handle two or more gas types and ranges
- The need for dedicated devices is reduced to only a few models
- Reduces the capital investment and inventory liability
- Performance maintained after gas change
- Shortening gas purge time needed
- Complete gas shut-off
- Gas leaking volume 1/10 related to that with a standart combination (MFC and pneumatic valve)
- Reduction of gas surge
- Allows one mass flow controller to handle two or more gas types and ranges
- The need for dedicated devices is reduced to only a few models
- Reduces the capital investmen and inventory liability
- Performace maintained after gas change