AERA PI-980 SERIES
Group Number: 4960With industry-leading flow control technology, Aera PI-980 Series pressure - insensitive MFCs (mass flow controllers) anticipate the increasing demands of next-generation semiconductor manufacturing processes, including etch, CVD, PVD, and diffusion.
FEATURES
- Pressure-insensitive operation
- High accuracy and repeatability Integrated gas panel components
- Live gas certified, multi-gas, multi-range configuration
- Field programmable
- DeviceNet, RS-485, and analog control
- All-metal seals and ultra-pure design
BENEFITS
- Improved gas delivery performance and production yields
- Easy integration on tool
- Substantial gas panel cost savings
- Reduced gas panel foot print
- Real-time communication and control
- World-class service and support