AERA FC-DR980 SERIES
Group Number: 4960Aera®FC-DR980 series digital MFCs (mass flow controllers) and MFMs (mass flow meters) deliver performance excellence and operational versatility, resulting in significant cost savings and ease of use.
FEATURES
- Multi-gas, multi-range selection*
- Analog, analog/digital, and digital modes
- Piezoelectric control valves
- Multipl alarm and dianostic capabilities
- Metal seals, with a 1 × 10-10 leak integrity
- Electropolished and ultra-cleaned gas-wetted surfaces
BENEFITS
- Superior accuracy, repeatability, and stability
- Significant cost savings
- Superior operational versatility
- Superior reliability