AERA FC-DR980 SERIES

Aera^®FC-DR980 series digital MFCs (mass flow controllers) and MFMs (mass flow meters) deliver performance excellence and operational versatility, resulting in significant cost savings and ease of use.

FEATURES

• Multi-gas, multi-range selection*
• Analog, analog/digital, and digital modes
• Piezoelectric control valves
• Multipl alarm and dianostic capabilities
• Metal seals, with a 1 × 10^_-10 leak integrity
• Electropolished and ultra-cleaned gas-wetted surfaces

BENEFITS

• Superior accuracy, repeatability, and stability
• Significant cost savings
• Superior operational versatility
• Superior reliability