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SAM® 1480/2480 G1 SERIES

组号: 4960

G1 models satisfy the demand for the next generation of semiconductor production.


  • Multi-gas, multi-range selection
  • Pressure-insensitive operation
    Valve shut-off function
  • LCD display (temp, pressure, set, output) easifies control routines


  • Great inlet pressure change insensitivity
  • Allows one mass flow controller to handle two or more gas types and ranges
  • The need for dedicated devices is reduced to only a few models
  • Reduces the capital investment and inventory liability
  • Performance maintained after gas change
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Acrobat Logo SAM_catalogue_1480F-1580F-1680F.pdf