SAM® 1480/2480 G1 SERIES

G1 models satisfy the demand for the next generation of semiconductor production.

FEATURES

• Multi-gas, multi-range selection
• Pressure-insensitive operation
  Valve shut-off function
• LCD display (temp, pressure, set, output) easifies control routines

BENEFITS

• Great inlet pressure change insensitivity
• Allows one mass flow controller to handle two or more gas types and ranges
• The need for dedicated devices is reduced to only a few models
• Reduces the capital investment and inventory liability
• Performance maintained after gas change