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SAM® SFC-1580/1680F SERIES

组号: 4960

SFC-1580/1680 series is the high temperature version of compact digital Mass Flow Controllers.

A separate control unit with heat proofed connection, a lower sensor heating temperature, and high temperature piezo-stack are used. A simple valve structure, which does not compress and expand gas, prevents re-condensation.

FEATURES

  • Higher operating temperature 150 °C
  • Built-in structure to prevent recondensation
  • Fast response < 1 sec flow settling time
  • Metal seals
  • Flow 10 SCCM - 30 SLM (14 models available)
  • Leak integrity < 1x10-11 Pa m3/s He

HIGHER OPERATING TEMPERATURES

 

BENEFITS

  • Application into high temperature processing
  • Easy integration - standard connectors and dimensions
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Acrobat Logo SAM_catalogue_1480F-1580F-1680F.pdf