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SAM® SFC-1480F SERIES

组号: 4960

SFC-1480F Series is a basic series of compact digital Mass Flow Controllers offering very low flow.

FEATURES

  • Very fast response < 0,7 - 1,2 sec flow settling time
  • Metal/rubber seals
  • Flow 1 SCCM - 20 SLM (12 models available)
  • Leak integrity < 1 x 10-11 Pa m3/s He (Viton 10-8)

BENEFITS

  • Monitoring of operation using digital interface is possible
  • Minimal particle generation
  • Long operation life
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Acrobat Logo SAM_catalogue_1480F-1580F-1680F.pdf